ATE

Semiconductor Test Product

Semiconductor Manufacturing Processing Line Power Supply Unit

ODA power supply is used to supply power to CEDI of the wafer cleaning water purification process (ultra pure water factory) in the semiconductor manufacturing process line.
This is a device that converts the supplied water into ultra-pure water. It should be a product that has reliability and durability that the product should operate without problem even if it is working for 24 hours, 365 days, 2 years, 3 years so that the semiconductor process will not stop.
It can be easily adopted by the SI company who builds the system by providing various communication interfaces.

Semiconductor Manufacturing Processing Line Power Supply Unit

Key Features

  • Purification process of wafer cleaning water in the semiconductor manufacturing process line, Power supply for ultra pure water purification of water in ultra pure water factory
  • Providing Various power capacity(Small and High power)
  • Various communication interface : local control/ Remote control by Analog Programming 4-20mA, RS485, Modbus RTU etc.
  • Independent protection fuction
  • Multi-channel configurable according to user’s demands
  • Precise Motor characteristics test with low ripple and noise
  • High precision measurement

Specitifation

  • 15kW 3U Compact size
  • Parallel Operation R11; max. 5units, Series Operation R11; 2units
  • Power Factor : 0.8 @ Full rate and 460Vac
  • Programming & Readback Accuracy : Volt ±0.1% of Full Scale/Curr ±0.4% of Full Scale
  • OVP, OCP, OTP, FAN Fail, PMP, VA Balance, V-Sens Error, AC Input Fail, Rectifier Fail Protection
  • Dimension : 426mm(W) x 132mm(H) x 600mm(D)
  • Weight : about 30kg
  • Ripple Noise : Volt 60mVrms/Curr ±0.1% rms
  • Voltage Rise/Fall Time : Rising 100ms 10%~90% Half load/Falling 100ms 90%~10% Half load
  • Current Rise/Fall Time : Rising 100ms 10%~90% Half load/Falling 100ms 90%~10% Half load
  • Transient Response Time : 0.75%/1ms, 50%~100% or 100%~50% load change Recovers within 1ms to ±0.75% of full-scale
  • Efficiency : Max load 88% Volt max set, 50% load 80%
  • Stability : 0.05%/8Hr of F.S

Application

Purification process of wafer cleaning water in the semiconductor manufacturing process line, Power supply for ultra pure water purification of water in ultra pure water factory

Main Customer

Main Customer